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Cirrus 3 Quadrupole Mass Spectrometer


Atmospheric Pressure Gas Monitoring

Building on proven Cirrus Quadrupole Mass Spectrometry technology, the Cirrus 3 combines state-of-the-art performance in compact benchtop and rack-mounted formats. With a heated capillary inlet and fast scan speed (250 points per second), gas compositions can be tracked over wide dynamic range (ppb to percentage levels) more reliably.

  • Monitors multiple gas species from trace levels (ppb) to high abundance
  • Fast response - 250 data points per second & capillary inlet heated up to 300°C
  • Precise and stable user-defined temperature control with enhanced oven and capillary designs
  • Detect gases up to 300 amu. High resolution options (1-100HP)
  • Recipe-driven Process Eye™ Professional supports gas monitoring and quantitation applications

Fast and Reproducible Data
Cirrus systems are based on Quadrupole Mass Spectrometry, widely acknowledged as a preferred platform technology for many atmospheric pressure gas analysis applications. The Cirrus 3 system, with its improved temperature control and compact design, provides high levels of performance and robustness in space-efficient and flexible configurations that are ideal for a wide range of analytical applications.

Precision engineered to provide fast and reproducible data, Cirrus 3 can accurately detect and quantify gases and gas mixtures, from one or more sampling locations with a single instrument. Gas composition can be monitored over a wide dynamic range, from percentage levels down to the sub ppm range.

Cirrus 3 is an ideal choice for atmospheric gas analysis whether you work in a research setting or a manufacturing environment. By combining Process Eye Professional software with MKS technical support, Cirrus can be integrated, optimized, and automated to your precise specifications. Ultimately, users across your organization realize greater benefits of the power of quadrupole mass spectrometry.

Quadrupole Analyzer

At the heart of every Cirrus 3 system is a precision-built quadrupole analyzer incorporating a closed ion source, a triple mass filter, and a dual (Faraday and Secondary Electron Multiplier) detector system. This analyzer configuration is selected to optimize sensitivity and longterm performance stability

The Cirrus 3 system enables the AutoChem II 2920 and AutoChem 2950 HP to function as multi-component microreactors. Cirrus 3 software includes Process Eye™ Professional which controls analyzer data collection and monitors real-time data and analyzer status.

A Recipe wizard helps create and configure analysis conditions. The Micromeritics/Cirrus interface software runs inside Process Eye Professional and is accessed via its own menu.

This interface enables the user to control the analyzer via recipes which can also be saved for future use. The interface allows the user to collect data automatically from the AutoChem, customize Peak Jump recipes, access standard operations, calibrate detectors, and scale the AutoChem sample thermocouple signal.

Data integration with AutoChem II 2920 and AutoChem 2950 HP

  • MS data may be analyzed using the Micromeritics Peak Editor that allows signal deconvoution (peak fitting), signal integration, and smoothing.
  • The AutoChem software may be used to create MS calibrations and convert raw signals to quantitative analyses.
  • Data may be used directly in AutoChem characterization reports: dispersion, active area, kinetics, crystallite size.

Features and Benefits:

  • Monitors multiple gas species over a wide dynamic range of composition at atmospheric pressure
  • Compact, modular design for ease of serviceability and maintenance
  • Direct Ethernet interface - fully network compatible
  • Recipe driven Process Eye™ Professional software for automated operation and calibration
  • Fast response, silica capillary inlet heated to 150° C

For sampling different gas conditions, inlet options available are:

  • Stainless steel capillary
  • Low flow capillaries
  • Multi-stream inlets
  • Automated variable pressure inlet

Monitoring of trace contaminants in process gas

Catalyst studies

Fuel cell monitoring and development

Heat treatment/furnace monitoring

Membrane studies

Glove box gas monitoring

Lamp manufacture

Gas supply monitoring (cylinder checks and special gas production)

Freon detection and identification

Environmental monitoring. Thermal analysis - TGA, DTA

Fermentation process monitoring